Dry etching machine

The utility model provides a dry etching machine, which comprises a front end module, a chemical filter, a fan and a heater, and is characterized in that the front end module is a box body structure, and the side surface of the box body structure is provided with a side air inlet; the chemical filter is positioned on the side surface of the box body structure and covers the side air inlet; the fan is located at the side air inlet, an air inlet of the fan faces an air outlet of the chemical filter, and an air outlet of the fan is connected with a pipeline communicated with the side air inlet in the box body structure; a heater is located inside the conduit. The dry etching machine has the following beneficial effects: the chemical filter adopts an embedded design, so that the daily maintenance of equipment is not influenced; the fan is added to ensure that the size is reduced but the wind pressure is not changed; the heater safety coefficient is improved. 本申请提供一种干法刻蚀机，包括前端模块、化学过滤器、风机和加热器，其中，前端模块为一箱体结构，该箱体结构的侧面