Dustproof semiconductor industry special gas source cabinet

The utility model belongs to the technical field of radioactive liquid, and particularly relates to a dustproof semiconductor industry special gas source cabinet, which comprises a gas source cabinet main body and a mounting mechanism arranged above the gas source cabinet main body, and an arranged...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	ZHANG CHONGEN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BLASTING FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED,LIQUEFIED, OR SOLIDIFIED GASES FIXED-CAPACITY GAS-HOLDERS HEATING LIGHTING MECHANICAL ENGINEERING STORING OF DISTRIBUTING GASES OR LIQUIDS VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED ORSOLIDIFIED GASES WEAPONS
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