Dustproof semiconductor industry special gas source cabinet

The utility model belongs to the technical field of radioactive liquid, and particularly relates to a dustproof semiconductor industry special gas source cabinet, which comprises a gas source cabinet main body and a mounting mechanism arranged above the gas source cabinet main body, and an arranged...

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1. Verfasser: ZHANG CHONGEN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model belongs to the technical field of radioactive liquid, and particularly relates to a dustproof semiconductor industry special gas source cabinet, which comprises a gas source cabinet main body and a mounting mechanism arranged above the gas source cabinet main body, and an arranged sealing cover is opened and closed with the gas source cabinet main body through a connecting shaft. Then when the sealing cover is opened and closed, the sealing bolt is tightly attached to the sealing groove through the rubber bolt, the sealing performance of the sealing cover during installation is improved, the dustproof purpose is achieved, the internal safety is improved, then the arranged threaded rod rotates to a certain degree through the micro motor, then the position of the installation support is adjusted, and the sealing cover can be conveniently installed. A certain adjustment effect is achieved according to the size of an internal semiconductor gas tank, then the mounting bracket is of a U-shaped str