Photoresist conveying device of coating machine
The utility model discloses a photoresist conveying device of a coating machine, which relates to the technical field of coating equipment and comprises a photoresist barrel and a coating tool bit, an injection pump is arranged between the photoresist barrel and the coating tool bit, the photoresist...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model discloses a photoresist conveying device of a coating machine, which relates to the technical field of coating equipment and comprises a photoresist barrel and a coating tool bit, an injection pump is arranged between the photoresist barrel and the coating tool bit, the photoresist barrel is communicated with the injection pump, the coating tool bit is communicated with the injection pump, a sealing barrel is arranged outside the photoresist barrel, and the sealing barrel is communicated with the coating tool bit. And the sealing barrel is externally connected with a compressed air source. The compressed air source conveys compressed air into the sealing barrel, so that the air pressure in the sealing barrel is quickly increased, and the photoresist in the photoresist barrel is extruded, so that the photoresist quickly enters the injection pump, the injection pump conveys the photoresist to the coating tool bit, the photoresist is quickly conveyed, the conveying time of the photoresist is sh |
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