Moving and storing device for semiconductor cutting equipment
The utility model relates to a transfer and storage device for semiconductor cutting equipment, which comprises a rack, a placing mechanism, a storage mechanism and a transfer mechanism, the placing mechanism is arranged on the rack, the storage mechanism comprises a storage box, a support plate and...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model relates to a transfer and storage device for semiconductor cutting equipment, which comprises a rack, a placing mechanism, a storage mechanism and a transfer mechanism, the placing mechanism is arranged on the rack, the storage mechanism comprises a storage box, a support plate and a storage driving piece, the storage box is arranged at the side part of the placing mechanism, the top and the bottom of the storage box are provided with openings, and the storage box is arranged on the support plate. The supporting plate is arranged below the storage box, can move in the vertical direction and enters the storage box from an opening in the bottom of the storage box, the storage driving part is used for driving the supporting plate to move, the carrying mechanism is arranged above the containing mechanism and the storage mechanism and comprises an adsorption assembly and a carrying driving assembly, the adsorption assembly is arranged on the carrying driving assembly, and the carrying driving ass |
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