Wafer heat treatment cavity device

The utility model discloses a wafer heat treatment cavity device which comprises a heating box, the top of the heating box is fixedly provided with a laser emission head, the inner wall of the heating box is fixedly connected with a fixed plate, the inner side of the fixed plate is rotatably provide...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ZHAO HAORAN, LI HONGYE, BAI YERU, CHU YINA
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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