Groove body of integrated circuit groove type machine table

The utility model relates to a groove body of an integrated circuit groove type machine table. The embodiment of the utility model provides a groove body of a groove type machine table, the groove body comprises a groove body side wall plate, a liquid discharge hole and a groove body bottom plate ex...

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Bibliographische Detailangaben

1. Verfasser:	LAI ZHONGLIANG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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