Groove body of integrated circuit groove type machine table

The utility model relates to a groove body of an integrated circuit groove type machine table. The embodiment of the utility model provides a groove body of a groove type machine table, the groove body comprises a groove body side wall plate, a liquid discharge hole and a groove body bottom plate extending between the groove body side wall plate and the liquid discharge hole, and the top surface of the groove body bottom plate inclines towards the liquid discharge hole. And the inclined included angle between the top surface of the tank body bottom plate and the horizontal plane extending from the top of the liquid discharge hole is greater than zero. 本申请涉及一种集成电路槽式机台的槽体。本申请部分实施例提供了一种槽式机台的槽体，该槽体包括：槽体侧壁板、排液孔及在槽体侧壁板及排液孔之间延伸的槽体底板，其中槽体底板的顶部表面向排液孔的方向倾斜，且槽体底板的顶部表面与排液孔的顶部延伸的水平面之间的倾斜夹角大于零。