Target material and evaporation assembly
The utility model provides a target material, and relates to the technical field of electron beam evaporation coating. The target material is in a frustum shape, the diameter of the upper top of the target material is L, the diameter of the lower bottom of the target material is M, and L/M is larger...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model provides a target material, and relates to the technical field of electron beam evaporation coating. The target material is in a frustum shape, the diameter of the upper top of the target material is L, the diameter of the lower bottom of the target material is M, and L/M is larger than 1.1 and smaller than 1.2. The target material is arranged to be frustum-shaped, so that the shape of the target material can be matched with that of the crucible, the side wall surface of the target material can be in contact with the inner side wall surface of the crucible, and the heat dissipation effect of the target material is improved. When the upper top diameter L and the lower bottom diameter M of the target meet the condition that L/M is larger than 1.1 and smaller than 1.2, it is guaranteed that the area of the upper top face of the target is large enough, and then the uniformity of a film layer formed through film coating is guaranteed. And the area of the lower bottom surface is large enough, so t |
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