Special wafer guide device for semiconductor wafer acid etching machine

The utility model provides a special guide piece device for a semiconductor chip acid corrosion machine, which relates to the technical field of semiconductor acid corrosion, and comprises a guide piece groove and a guide piece assembly arranged in the guide piece groove, the guide piece groove comp...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZHANG MUXIANG, CAO QIANG, AZUMA SHIHIRO, TAN YONGLIN
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:The utility model provides a special guide piece device for a semiconductor chip acid corrosion machine, which relates to the technical field of semiconductor acid corrosion, and comprises a guide piece groove and a guide piece assembly arranged in the guide piece groove, the guide piece groove comprises a groove body and a support table arranged in the groove body, the bottom of the groove body is provided with a liquid inlet structure, and the side wall of the groove body is provided with a liquid discharge structure; a positioning pin shaft is arranged at the top of the supporting table; a rotating shaft for driving the supporting table to act is arranged at the bottom of the supporting table; the wafer guiding assembly comprises a base, a support, a transfer box and a roller structure, the support, the transfer box and the roller structure are arranged on the base, a plurality of positioning pin shaft holes used for being connected with the positioning pin shafts in a matched mode are formed in the base,