Alignment apparatus and lamination apparatus including same

An alignment apparatus and a laminating apparatus including the same are provided. The alignment device comprises a first workbench; a plurality of base plates which are disposed on the first stage and on which a material can be placed; and a plurality of second stages disposed below the first stage...

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Bibliographische Detailangaben
Hauptverfasser: OKAMOTO TETSUYA, JIANG XIZHOU, KIM SANGUL, WU MINGXUN, LEE JUN-HEE, PARK TAE-YOUNG, KIM BYUNG-MU, LI DONGJIE
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:An alignment apparatus and a laminating apparatus including the same are provided. The alignment device comprises a first workbench; a plurality of base plates which are disposed on the first stage and on which a material can be placed; and a plurality of second stages disposed below the first stage and connected to each of the base plates so as to be able to align each of the base plates in the X direction, the Y direction, and the [theta] direction. 提供对齐装置以及包括其的层压装置。对齐装置包括:第一工作台;多个基底板,配置在所述第一工作台上,能够安置材料;以及多个第二工作台,配置在所述第一工作台的下方,与各个所述基底板连接,从而能够在X方向、Y方向和θ方向上对齐各个所述基底板。