Wafer carrier box for plasma degumming machine

A wafer carrier box for a plasma degumming machine comprises supports, the supports are symmetrically distributed and fixedly connected through a cross rod, a cleaning channel is formed between the supports, each support is provided with a first end portion and a second end portion, and the supports extend from the first end portions to the second end portions in an arc mode. The shielding assembly is arranged between the supports and used for positioning a wafer so as to protect the wafer, and the shielding assembly comprises a shielding rod and clamping grooves, the two ends of the shielding rod are connected with the supports respectively, and the clamping grooves are formed in the shielding rod at intervals. According to the utility model, by arranging the positioning assembly, the effect of shielding and protecting the wafers is achieved, the existence of the clamping grooves I can play a guiding role when the wafers are converted, and the wafers can be fixed more stably, so that the problems that the ti