Electrostatic chuck and wafer etching system

The utility model relates to the technical field of semiconductors, and provides an electrostatic chuck and a wafer etching system, the electrostatic chuck comprises a ceramic adsorption layer and a metal base, the ceramic adsorption layer and the metal base are connected in an edge welding mode, an...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WANG CHAOXING, YANG PENGYUAN, WANG JIANCHONG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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