Wafer storage device

The utility model discloses wafer storage equipment, which comprises a wafer cache module, the wafer cache module comprises a cache frame, the cache frame is used for storing wafers carried by a wafer fork, a cache cavity with an opening at one end is defined by the cache frame, the wafers are stored in the cache cavity at intervals up and down, and at least one positioning detection part is arranged in the cache cavity. And the positioning detection part is used for checking the wafer taking and placing position of the wafer fork and the levelness of the cache frame. The positioning detection part comprises a detection unit, and the detection unit is fixed in the cache cavity and used for detecting the levelness of the cache frame. The sheet fork comprises two clamping surfaces, the number of the clamping surfaces is two, the two clamping surfaces are distributed in a mirror image mode and are vertically arranged, the sheet fork comprises a U-shaped positioning opening, and the clamping surfaces are matched