Photoetching machine wafer carrying table structure suitable for shooting
The utility model belongs to the technical field of semiconductor manufacturing, and provides a photoetching machine chip carrying table structure suitable for shooting, which comprises an operation table, a base arranged on the operation table, a chip carrying table arranged on the base, and an arc...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model belongs to the technical field of semiconductor manufacturing, and provides a photoetching machine chip carrying table structure suitable for shooting, which comprises an operation table, a base arranged on the operation table, a chip carrying table arranged on the base, and an arc-shaped driving mechanism arranged on the operation table and capable of doing arc-shaped motion around the chip carrying table, an adjustable holder for mounting a camera is arranged on the arc-shaped driving mechanism; the arc-shaped driving mechanism comprises two brackets which are oppositely arranged, namely a first F-shaped bracket and a second F-shaped bracket, a driving bracket, a driven bracket and a mounting platform which are arranged between the first F-shaped bracket and the second F-shaped bracket, and a motor for driving the driving bracket. According to the utility model, the shooting angle of the camera for the slide holder is enlarged, and the problem of large limitation of the shooting angle of t |
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