MEMS-based IEPE circuit and acceleration sensor

The utility model discloses an MEMS-based IEPE circuit and an acceleration sensor, and is applied to the technical field of electronics. The IEPE circuit internally comprises a current-limiting voltage-stabilizing circuit and an MEMS chip, the positive electrode of an external constant-current power...

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Bibliographische Detailangaben
Hauptverfasser:	LI HUANSHU, ZENG YAJUAN, XIAO HANYU, PU JINFEI, WANG WEISONG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	AMPLIFIERS BASIC ELECTRONIC CIRCUITRY ELECTRICITY IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK PHYSICS PULSE TECHNIQUE RESONATORS TESTING
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Beschreibung
Zusammenfassung:	The utility model discloses an MEMS-based IEPE circuit and an acceleration sensor, and is applied to the technical field of electronics. The IEPE circuit internally comprises a current-limiting voltage-stabilizing circuit and an MEMS chip, the positive electrode of an external constant-current power supply is connected with the input end of the current-limiting voltage-stabilizing circuit so as to supply power to the current-limiting voltage-stabilizing circuit, the output end of the current-limiting voltage-stabilizing circuit is connected with a power supply interface of the MEMS chip so as to provide fixed voltage and constant current for the MEMS chip, the grounding end of the MEMS chip is grounded, and the output end of the MEMS chip is connected with the power supply interface of the MEMS chip. The voltage signal output end of the MEMS chip is connected with the positive electrode of an external constant-current power supply through an amplification shift circuit. The key point of the scheme lies in tha