Wafer robot storage position mounting structure and wafer transfer robot
The utility model provides a wafer robot storage position mounting structure and a wafer transfer robot. The wafer robot storage position mounting structure comprises a base, a center console and a bearing platform. The center console is connected with the base, the interface assembly comprises a be...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model provides a wafer robot storage position mounting structure and a wafer transfer robot. The wafer robot storage position mounting structure comprises a base, a center console and a bearing platform. The center console is connected with the base, the interface assembly comprises a bearing plate and a line interface, the bearing plate is connected with the center console, and the line interface is installed on the bearing plate. The bearing platform comprises a supporting mechanism, a power utilization mechanism and a connecting mechanism, the supporting mechanism is detachably connected with the center console and used for containing a wafer box, the power utilization mechanism is installed on the supporting mechanism, one end of the connecting mechanism is detachably connected with the line interface in an inserted mode, and electric energy is transmitted to the power utilization mechanism from the line interface when the connecting mechanism is connected with the line interface in an inserte |
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