Rotary table of z-direction horizontal spin coater

The utility model belongs to the field of spin coater, and particularly relates to a z-direction horizontal spin coater turntable which comprises a spin coater body, the bottom end of the spin coater body is fixedly connected with a damping base mechanism, the bottom end of the damping base mechanis...

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Bibliographische Detailangaben
1. Verfasser: QUAN JINHUA
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model belongs to the field of spin coater, and particularly relates to a z-direction horizontal spin coater turntable which comprises a spin coater body, the bottom end of the spin coater body is fixedly connected with a damping base mechanism, the bottom end of the damping base mechanism is fixedly connected with a bottom plate, the front side of the spin coater body is provided with a control panel, the top end of the spin coater body is fixedly connected with a shell, and the interior of the shell is rotatably connected with a rotating disc body. The side of the top end of the shell is rotationally connected with a turning cover. Through the arranged damping base mechanism, when the rotary table body rotates, the spin coater body can generate certain vibration to compress a damper and a second damping spring, and meanwhile, a connecting piece is driven to move downwards, so that a connecting frame is driven to move downwards, the connecting frame slides downwards, and then a first damping sprin