Trichlorosilane synthetic furnace heating system
The utility model discloses a heating system of a trichlorosilane synthetic furnace, and belongs to the technical field of trichlorosilane synthesis. Comprising a trichlorosilane synthetic furnace, a hot water storage tank and a heater, wherein the trichlorosilane synthetic furnace is connected with...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model discloses a heating system of a trichlorosilane synthetic furnace, and belongs to the technical field of trichlorosilane synthesis. Comprising a trichlorosilane synthetic furnace, a hot water storage tank and a heater, wherein the trichlorosilane synthetic furnace is connected with a hot water pipeline, a hydrogen pipeline and a hydrogen chloride pipeline which are used for heating the trichlorosilane synthetic furnace; the hot water storage tank is connected with the trichlorosilane synthesis furnace through a hot water pipeline, the trichlorosilane synthesis furnace is connected with the hot water storage tank through a recovery pipe, and a continuous passage for water circulation is formed among the hot water storage tank, the hot water pipeline, the trichlorosilane synthesis furnace and the recovery pipe; the heaters are arranged on the hydrogen pipeline and the hydrogen chloride pipeline. According to the utility model, hot water is firstly adopted for heating, then hydrogen and hydroge |
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