PECVD drying device
The utility model belongs to the technical field of solar cells, and particularly discloses a PECVD (Plasma Enhanced Chemical Vapor Deposition) drying device which comprises a base, a walking part, a drying agent, a wireless humidity sensor and a drying box, the walking part is arranged at the lower...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model belongs to the technical field of solar cells, and particularly discloses a PECVD (Plasma Enhanced Chemical Vapor Deposition) drying device which comprises a base, a walking part, a drying agent, a wireless humidity sensor and a drying box, the walking part is arranged at the lower end of the base, the drying box is supported by the upper end of the base, the drying agent is arranged in the drying box, and the wireless humidity sensor is arranged in the drying box. The wireless humidity sensor is arranged on the outer side of the drying box. The drying box on the base is driven by the walking component to move, an automatic environment is dried through the drying agent arranged in the drying box, it can be guaranteed that the humidity in the automatic environment is within a set threshold value range, and meanwhile the wireless humidity sensor is arranged to monitor the environment humidity in real time; under the condition that the environment humidity does not reach the standard, the dryin |
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