Ceramic nozzle sintering forming device for CVD (Chemical Vapor Deposition)
The utility model relates to the technical field of ceramic nozzle sinter molding, in particular to a ceramic nozzle sinter molding device for CVD (chemical vapor deposition), which comprises a sintering box, a main support arranged at the outer end of the sintering box, a spiral groove and a sinter...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model relates to the technical field of ceramic nozzle sinter molding, in particular to a ceramic nozzle sinter molding device for CVD (chemical vapor deposition), which comprises a sintering box, a main support arranged at the outer end of the sintering box, a spiral groove and a sintering cavity arranged on the sintering box, a side plate arranged on the main support, a material vibrating filter box arranged above the sintering box, and an air cylinder and a guide plate arranged on the main support. The silicon powder input into the sintering cavity is effectively vibrated and filtered, the silicon powder conforming to the filtering hole volume of the filtering cylinder is input into the corresponding sintering cavity, and the situation that the silicon powder with the large particle volume directly enters the sintering cavity to be heated and sintered, and consequently air holes are formed in the surface of the sintered silicon nitride ceramic nozzle is avoided; the forming quality of the CVD s |
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