Laser boron doping equipment with efficient dust removal system

The utility model discloses laser boron doping equipment with an efficient dust removal system, which comprises a laser light path system, a laser processing platform, a feeding and discharging flow channel, a whole machine shell and the dust removal system, and the dust removal system comprises a t...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZUO GUOJUN, ZHOU ZHIHAO, WANG KEPENG, TIAN XILIN, XU SHUANGZHEN
Format: Patent
Sprache:chi ; eng
Schlagworte:
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