Laser boron doping equipment with efficient dust removal system

The utility model discloses laser boron doping equipment with an efficient dust removal system, which comprises a laser light path system, a laser processing platform, a feeding and discharging flow channel, a whole machine shell and the dust removal system, and the dust removal system comprises a t...

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Bibliographische Detailangaben
Hauptverfasser: ZUO GUOJUN, ZHOU ZHIHAO, WANG KEPENG, TIAN XILIN, XU SHUANGZHEN
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The utility model discloses laser boron doping equipment with an efficient dust removal system, which comprises a laser light path system, a laser processing platform, a feeding and discharging flow channel, a whole machine shell and the dust removal system, and the dust removal system comprises a table top dust removal device, an ion air knife device, a flow channel dust removal device and an air filtering device. The table-board dust removal device is mounted between the laser light path system and the laser processing platform and is used for sucking dust-carrying gas generated in the laser processing process; the ion air knife device is installed on the feeding and discharging flow channel and used for conducting static electricity removal and dust removal on workpieces. The flow channel dust removal device is mounted on the feeding and discharging flow channel and is used for sucking away dust on the workpieces; the air filtering device is installed on the whole machine shell and used for providing clean