Groove type SIC chip

The utility model provides a groove type SIC chip, which belongs to the technical field of SIC chips and comprises a body, and a substrate of the body is made of 4H-SIC crystal materials. A plurality of linear grooves which are arranged in parallel at intervals are formed in the upper surface of the body through photoetching and corrosion processes; the cross section of each groove is rectangular, and the bottom of each groove is provided with a single crystal tube core and a PN junction. The single crystal tube core is a p-type doped 4H-SIC single crystal tube core, and the single crystal tube core is uniformly embedded at the bottom of each groove. N-type doped PN junctions made of 4H-SIC materials are formed at the junctions of the substrate areas on the two sides of the single crystal tube core and the single crystal tube core. The technical problem that in the prior art, due to the fact that the surface defect density of an SIC substrate is large, the quality of an epitaxial layer of a chip can be affect