Substrate table for growing diamond film

The utility model relates to a substrate table for growing a diamond film, which comprises a base plate and at least two substrates arranged on the base plate, and the substrates are exposed to microwave radiation in a chamber for supplying hydrogen and one or more hydrocarbon gases to form the diamond film. Each substrate independently corresponds to the specification of a diamond film to be processed, the base plate is provided with at least two insertion parts, and each substrate can be selectively inserted into the insertion parts. The substrate table has the advantages that substrates corresponding to different specifications of diamond films to be machined can be placed on the substrate table at the same time, the substrates of different specifications can be replaced conveniently, and products of different models can grow on the same substrate table. 本实用新型涉及一种金刚石膜生长用的基片台，包括有基板和设置在基板上的衬底，所述衬底供氢气和一种或多种烃气体的室中暴露于微波辐射以形成金刚石膜，其特征在于：所述衬底设置有至少两个，每个衬底独立地对应于自身待加工的金刚石膜的规格，而所述基板上设置有至少两个插设部，每个所述衬底能被择一性地插入所述插设部中。本实用