Automatic cleaning equipment for thermal field of single crystal furnace

The utility model relates to the technical field of single crystal furnace maintenance, and provides a single crystal furnace thermal field automatic cleaning device which comprises a sealing chamber, a transparent sealing door movably arranged on the surface of the sealing chamber and supporting le...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: DONG YONGJIAN, HUANG JINQIANG, LI XIAOPO
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model relates to the technical field of single crystal furnace maintenance, and provides a single crystal furnace thermal field automatic cleaning device which comprises a sealing chamber, a transparent sealing door movably arranged on the surface of the sealing chamber and supporting legs fixed to the bottom of the sealing chamber, a handle is fixedly connected to the surface of the transparent sealing door, and two polishing wheels are arranged in the sealing chamber. A grinding mechanism is arranged at the top of the sealing chamber and used for driving two grinding wheels to get close to each other to grind the top and the bottom of the thermal field graphite piece at the same time, two clamps are arranged in the sealing chamber, and a fixing mechanism is arranged on the side face of the sealing chamber. The fixing mechanism is used for driving the two clamps to be close to each other to fix the thermal field graphite piece. By means of the technical scheme, the problems that in the prior art,