Fixture for gluing of tiny-size mask plate
The utility model discloses a clamp for gluing a tiny-size mask plate, which comprises a placing base, and the outer diameter size of the placing base is matched with the size of any mask plate produced on a large scale; a containing groove is formed in a placing base, the center of the containing g...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model discloses a clamp for gluing a tiny-size mask plate, which comprises a placing base, and the outer diameter size of the placing base is matched with the size of any mask plate produced on a large scale; a containing groove is formed in a placing base, the center of the containing groove is located over the center of the placing base, a to-be-glued tiny-size mask plate is placed in the containing groove, a vacuumizing hole, a plurality of supporting columns and a sealing ring are arranged on the bottom face of the containing groove, and the vacuumizing hole and all the supporting columns are located on the inner side of the sealing ring. The outer diameter of the sealing ring is smaller than the outer diameter of a to-be-glued mask plate with an extremely small size; all the supporting columns form a supporting surface for supporting the to-be-glued tiny-size mask plate, and before the to-be-glued tiny-size mask plate is placed in the containing groove, the top surface of the sealing ring is |
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