Welding airtightness detection jig for semiconductor PVD ceramic heater

The utility model discloses a semiconductor PVD (Physical Vapor Deposition) ceramic heater welding airtightness detection jig, and aims to overcome the defects of complex structure and poor detection effect of equipment for detecting the airtightness effect of a welding position between a metal ring...

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Bibliographische Detailangaben

Hauptverfasser:	GUO KAI, YAO XIANGMIN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	MEASURING PHYSICS TESTING TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
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