Welding airtightness detection jig for semiconductor PVD ceramic heater

The utility model discloses a semiconductor PVD (Physical Vapor Deposition) ceramic heater welding airtightness detection jig, and aims to overcome the defects of complex structure and poor detection effect of equipment for detecting the airtightness effect of a welding position between a metal ring and a ceramic plate in the prior art. The technical problem is solved through the following technical scheme that the tool comprises a tool body, a cylindrical detection cavity is arranged on the tool body, a first sealing groove is arranged in the circumferential direction of the inner side wall of the detection cavity, and a first sealing ring is arranged in the first sealing groove; a screw through hole is formed in the bottom of the detection cavity in a penetrating mode. According to the utility model, the metal ring welded on the ceramic plate is matched with the detection cavity, so that a sealed cavity is formed between the detection cavity and the ceramic heater; connecting a helium mass spectrometer with