Floor maintenance baffle for semiconductor device

The utility model provides a floor maintenance baffle plate for a semiconductor device, which is characterized in that a floor maintenance baffle plate is arranged, the floor maintenance baffle plate comprises N folding plates and moving wheels arranged at the bottoms of the N folding plates, and N...

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Hauptverfasser: WANG WEI, XU WENZE
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The utility model provides a floor maintenance baffle plate for a semiconductor device, which is characterized in that a floor maintenance baffle plate is arranged, the floor maintenance baffle plate comprises N folding plates and moving wheels arranged at the bottoms of the N folding plates, and N is a positive integer; the N folding plates are connected in a splicing manner; when the semiconductor device needs to be maintained, N folding plates in the landing maintenance baffle are in an unfolded state and surround the semiconductor device; when the semiconductor device does not need to be maintained, the N folding plates in the floor maintenance baffle are in a folded state, the maintenance baffle does not occupy the ceiling space, can move remotely through the moving wheels, and can be suitable for maintenance of the semiconductor device in a small range, and the maintenance efficiency is improved. And the maintenance and use of the semiconductor equipment in a plurality of areas can be covered. 本实用新型提供了一