Wafer holder

The utility model discloses a wafer clamping device, and relates to the technical field of wafer clamping tools. Comprising a handle, an upper pressing end rod and a lower positioning end rod, the lower positioning end rod is fixedly arranged at the end of the handle, a groove is formed in the top o...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: REN DIANSHENG, ZHANG HUA
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:The utility model discloses a wafer clamping device, and relates to the technical field of wafer clamping tools. Comprising a handle, an upper pressing end rod and a lower positioning end rod, the lower positioning end rod is fixedly arranged at the end of the handle, a groove is formed in the top of the handle and penetrates through the end of the handle, the upper pressing end rod comprises a connecting part and a clamping part, one end of the connecting part is connected with the clamping part, and the other end of the connecting part is connected with the clamping part. The other end of the connecting part is inserted into the groove and is connected with the handle through a rotating shaft, and a compression spring is arranged between the connecting part and the inner bottom wall of the groove. According to the utility model, the edge of the wafer is clamped through the upper pressing end rod and the lower positioning end rod, so that the wafer is picked up, the contact is reduced, and the condition that