Single-side grinding clamp for wafer

The utility model provides a wafer single-face grinding clamp, and relates to the field of wafer grinding. The wafer single-face grinding clamp comprises a disc-shaped clamp body, abrasion-resistant layers are arranged on the two side faces of the clamp body respectively, and an outer gear ring is a...

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Hauptverfasser: ZENG QI, LIU RUIXIONG, LIAO BIN, ZHOU TIEJUN
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Sprache:chi ; eng
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creator ZENG QI
LIU RUIXIONG
LIAO BIN
ZHOU TIEJUN
description The utility model provides a wafer single-face grinding clamp, and relates to the field of wafer grinding. The wafer single-face grinding clamp comprises a disc-shaped clamp body, abrasion-resistant layers are arranged on the two side faces of the clamp body respectively, and an outer gear ring is arranged on the outer periphery of the clamp body. A grinding blind hole and a drainage through hole are formed in the clamp body, and the hole axis of the grinding blind hole and the hole axis of the drainage through hole are parallel to the axis direction of the clamp body; the radial section of the grinding blind hole is in concave-convex fit with the plane outline of a wafer to be ground, an elastic part is arranged at the bottom of the grinding blind hole, and the upper surface of the elastic part is used for being attached to the wafer to be ground; the axial distance between the upper surface of the elastic part and the corresponding side face of the clamp body forms the depth of a blind hole, and the depth o
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The wafer single-face grinding clamp comprises a disc-shaped clamp body, abrasion-resistant layers are arranged on the two side faces of the clamp body respectively, and an outer gear ring is arranged on the outer periphery of the clamp body. A grinding blind hole and a drainage through hole are formed in the clamp body, and the hole axis of the grinding blind hole and the hole axis of the drainage through hole are parallel to the axis direction of the clamp body; the radial section of the grinding blind hole is in concave-convex fit with the plane outline of a wafer to be ground, an elastic part is arranged at the bottom of the grinding blind hole, and the upper surface of the elastic part is used for being attached to the wafer to be ground; the axial distance between the upper surface of the elastic part and the corresponding side face of the clamp body forms the depth of a blind hole, and the depth o</description><language>chi ; eng</language><subject>DRESSING OR CONDITIONING OF ABRADING SURFACES ; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS ; GRINDING ; MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING ; PERFORMING OPERATIONS ; POLISHING ; TRANSPORTING</subject><creationdate>2024</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20240412&amp;DB=EPODOC&amp;CC=CN&amp;NR=220762205U$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,309,781,886,25566,76549</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20240412&amp;DB=EPODOC&amp;CC=CN&amp;NR=220762205U$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>ZENG QI</creatorcontrib><creatorcontrib>LIU RUIXIONG</creatorcontrib><creatorcontrib>LIAO BIN</creatorcontrib><creatorcontrib>ZHOU TIEJUN</creatorcontrib><title>Single-side grinding clamp for wafer</title><description>The utility model provides a wafer single-face grinding clamp, and relates to the field of wafer grinding. 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language chi ; eng
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subjects DRESSING OR CONDITIONING OF ABRADING SURFACES
FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
GRINDING
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
PERFORMING OPERATIONS
POLISHING
TRANSPORTING
title Single-side grinding clamp for wafer
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