Inflation and exhaust system for excimer lamp
The utility model relates to the technical field of inflation and exhaust equipment of lamps, and discloses an excimer lamp inflation and exhaust system which comprises an inflation pipeline, an exhaust pipeline and an inflation and exhaust connector used for being connected with an excimer lamp tub...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model relates to the technical field of inflation and exhaust equipment of lamps, and discloses an excimer lamp inflation and exhaust system which comprises an inflation pipeline, an exhaust pipeline and an inflation and exhaust connector used for being connected with an excimer lamp tube, and the inflation pipeline and the exhaust pipeline are both connected with the inflation and exhaust connector. The exhaust pipeline is provided with first-stage vacuumizing equipment, second-stage vacuumizing equipment, a first-stage vacuum gauge and a second-stage vacuum gauge, the first-stage vacuumizing equipment controls connection and disconnection with the exhaust pipeline through a first vacuum valve, and the second-stage vacuumizing equipment controls connection and disconnection with the exhaust pipeline through a second vacuum valve; the primary vacuum gauge is electrically connected with the first vacuum valve, and the secondary vacuum gauge is electrically connected with the second vacuum valve. Ac |
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