Rapid temperature switching device capable of meeting semiconductor process requirements
The utility model discloses a rapid temperature switching device capable of meeting semiconductor process requirements, which is applied to the technical field of temperature control equipment and is characterized in that a partition plate is fixedly arranged in a water storage tank and is used for...
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| creator | ZHANG PINGYUN |
| description | The utility model discloses a rapid temperature switching device capable of meeting semiconductor process requirements, which is applied to the technical field of temperature control equipment and is characterized in that a partition plate is fixedly arranged in a water storage tank and is used for dividing the water storage tank into a high-temperature area and a low-temperature area; a first communication valve and a second communication valve are fixedly arranged in the high-temperature area and the low-temperature area of the water storage tank respectively, a high-temperature inlet connected with a water chilling unit is formed in the first communication valve, and a low-temperature outlet used for providing cooled fluid for the water chilling unit is formed in the second communication valve. A communicating pipeline is arranged between the first communicating valve and the second communicating valve, and a control valve is arranged on the communicating pipeline; the temperature control circuit has the t |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_CN220750545UU</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>CN220750545UU</sourcerecordid><originalsourceid>FETCH-epo_espacenet_CN220750545UU3</originalsourceid><addsrcrecordid>eNqNyj0KwkAQhuE0FqLeYbAXQjR4gKBYWYgBu7BOvsSF7I87s3p9ETyA1Vs877y4XUy0PSlcRDKaE0jeVvlh_Ug9XpZBbKK5T6AwkAP0KwJnOfg-s4ZEMQWGCCU8s01w8CrLYjaYSbD6dVGsj4drc9oghg4SDcNDu-ZcVeW-Lutd3bbbv6YPnbI8NQ</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Rapid temperature switching device capable of meeting semiconductor process requirements</title><source>esp@cenet</source><creator>ZHANG PINGYUN</creator><creatorcontrib>ZHANG PINGYUN</creatorcontrib><description>The utility model discloses a rapid temperature switching device capable of meeting semiconductor process requirements, which is applied to the technical field of temperature control equipment and is characterized in that a partition plate is fixedly arranged in a water storage tank and is used for dividing the water storage tank into a high-temperature area and a low-temperature area; a first communication valve and a second communication valve are fixedly arranged in the high-temperature area and the low-temperature area of the water storage tank respectively, a high-temperature inlet connected with a water chilling unit is formed in the first communication valve, and a low-temperature outlet used for providing cooled fluid for the water chilling unit is formed in the second communication valve. A communicating pipeline is arranged between the first communicating valve and the second communicating valve, and a control valve is arranged on the communicating pipeline; the temperature control circuit has the t</description><language>chi ; eng</language><subject>BLASTING ; COLD ROOMS ; COMBINED HEATING AND REFRIGERATION SYSTEMS ; COOLING OR FREEZING APPARATUS NOT COVERED BY ANY OTHERSUBCLASS ; HEAT PUMP SYSTEMS ; HEATING ; ICE-BOXES ; LIGHTING ; LIQUEFACTION SOLIDIFICATION OF GASES ; MANUFACTURE OR STORAGE OF ICE ; MECHANICAL ENGINEERING ; REFRIGERATION OR COOLING ; REFRIGERATORS ; WEAPONS</subject><creationdate>2024</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20240409&DB=EPODOC&CC=CN&NR=220750545U$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25543,76293</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20240409&DB=EPODOC&CC=CN&NR=220750545U$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>ZHANG PINGYUN</creatorcontrib><title>Rapid temperature switching device capable of meeting semiconductor process requirements</title><description>The utility model discloses a rapid temperature switching device capable of meeting semiconductor process requirements, which is applied to the technical field of temperature control equipment and is characterized in that a partition plate is fixedly arranged in a water storage tank and is used for dividing the water storage tank into a high-temperature area and a low-temperature area; a first communication valve and a second communication valve are fixedly arranged in the high-temperature area and the low-temperature area of the water storage tank respectively, a high-temperature inlet connected with a water chilling unit is formed in the first communication valve, and a low-temperature outlet used for providing cooled fluid for the water chilling unit is formed in the second communication valve. A communicating pipeline is arranged between the first communicating valve and the second communicating valve, and a control valve is arranged on the communicating pipeline; the temperature control circuit has the t</description><subject>BLASTING</subject><subject>COLD ROOMS</subject><subject>COMBINED HEATING AND REFRIGERATION SYSTEMS</subject><subject>COOLING OR FREEZING APPARATUS NOT COVERED BY ANY OTHERSUBCLASS</subject><subject>HEAT PUMP SYSTEMS</subject><subject>HEATING</subject><subject>ICE-BOXES</subject><subject>LIGHTING</subject><subject>LIQUEFACTION SOLIDIFICATION OF GASES</subject><subject>MANUFACTURE OR STORAGE OF ICE</subject><subject>MECHANICAL ENGINEERING</subject><subject>REFRIGERATION OR COOLING</subject><subject>REFRIGERATORS</subject><subject>WEAPONS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2024</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNyj0KwkAQhuE0FqLeYbAXQjR4gKBYWYgBu7BOvsSF7I87s3p9ETyA1Vs877y4XUy0PSlcRDKaE0jeVvlh_Ug9XpZBbKK5T6AwkAP0KwJnOfg-s4ZEMQWGCCU8s01w8CrLYjaYSbD6dVGsj4drc9oghg4SDcNDu-ZcVeW-Lutd3bbbv6YPnbI8NQ</recordid><startdate>20240409</startdate><enddate>20240409</enddate><creator>ZHANG PINGYUN</creator><scope>EVB</scope></search><sort><creationdate>20240409</creationdate><title>Rapid temperature switching device capable of meeting semiconductor process requirements</title><author>ZHANG PINGYUN</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN220750545UU3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2024</creationdate><topic>BLASTING</topic><topic>COLD ROOMS</topic><topic>COMBINED HEATING AND REFRIGERATION SYSTEMS</topic><topic>COOLING OR FREEZING APPARATUS NOT COVERED BY ANY OTHERSUBCLASS</topic><topic>HEAT PUMP SYSTEMS</topic><topic>HEATING</topic><topic>ICE-BOXES</topic><topic>LIGHTING</topic><topic>LIQUEFACTION SOLIDIFICATION OF GASES</topic><topic>MANUFACTURE OR STORAGE OF ICE</topic><topic>MECHANICAL ENGINEERING</topic><topic>REFRIGERATION OR COOLING</topic><topic>REFRIGERATORS</topic><topic>WEAPONS</topic><toplevel>online_resources</toplevel><creatorcontrib>ZHANG PINGYUN</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>ZHANG PINGYUN</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Rapid temperature switching device capable of meeting semiconductor process requirements</title><date>2024-04-09</date><risdate>2024</risdate><abstract>The utility model discloses a rapid temperature switching device capable of meeting semiconductor process requirements, which is applied to the technical field of temperature control equipment and is characterized in that a partition plate is fixedly arranged in a water storage tank and is used for dividing the water storage tank into a high-temperature area and a low-temperature area; a first communication valve and a second communication valve are fixedly arranged in the high-temperature area and the low-temperature area of the water storage tank respectively, a high-temperature inlet connected with a water chilling unit is formed in the first communication valve, and a low-temperature outlet used for providing cooled fluid for the water chilling unit is formed in the second communication valve. A communicating pipeline is arranged between the first communicating valve and the second communicating valve, and a control valve is arranged on the communicating pipeline; the temperature control circuit has the t</abstract><oa>free_for_read</oa></addata></record> |
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| language | chi ; eng |
| recordid | cdi_epo_espacenet_CN220750545UU |
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| subjects | BLASTING COLD ROOMS COMBINED HEATING AND REFRIGERATION SYSTEMS COOLING OR FREEZING APPARATUS NOT COVERED BY ANY OTHERSUBCLASS HEAT PUMP SYSTEMS HEATING ICE-BOXES LIGHTING LIQUEFACTION SOLIDIFICATION OF GASES MANUFACTURE OR STORAGE OF ICE MECHANICAL ENGINEERING REFRIGERATION OR COOLING REFRIGERATORS WEAPONS |
| title | Rapid temperature switching device capable of meeting semiconductor process requirements |
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