Rapid temperature switching device capable of meeting semiconductor process requirements
The utility model discloses a rapid temperature switching device capable of meeting semiconductor process requirements, which is applied to the technical field of temperature control equipment and is characterized in that a partition plate is fixedly arranged in a water storage tank and is used for...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model discloses a rapid temperature switching device capable of meeting semiconductor process requirements, which is applied to the technical field of temperature control equipment and is characterized in that a partition plate is fixedly arranged in a water storage tank and is used for dividing the water storage tank into a high-temperature area and a low-temperature area; a first communication valve and a second communication valve are fixedly arranged in the high-temperature area and the low-temperature area of the water storage tank respectively, a high-temperature inlet connected with a water chilling unit is formed in the first communication valve, and a low-temperature outlet used for providing cooled fluid for the water chilling unit is formed in the second communication valve. A communicating pipeline is arranged between the first communicating valve and the second communicating valve, and a control valve is arranged on the communicating pipeline; the temperature control circuit has the t |
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