Checking and sorting equipment for wafers

The utility model relates to the technical field of wafer inspection and sorting, in particular to wafer inspection and sorting equipment, which comprises an equipment box body, an inspection and sorting mechanism is arranged at the upper end of the equipment box body, the inspection and sorting mec...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LIU XINGBO, ZHU YOUQIANG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model relates to the technical field of wafer inspection and sorting, in particular to wafer inspection and sorting equipment, which comprises an equipment box body, an inspection and sorting mechanism is arranged at the upper end of the equipment box body, the inspection and sorting mechanism comprises a circular vibration disc, a first stepping motor, a detection disc, a detection part, a second stepping motor, a material distribution disc, a material receiving part and a plurality of material boxes, and a detection baffle plate is arranged at the upper end of the equipment box body. The detection baffle is located below the detection disc; the detection part comprises a detection frame, a micrometer, a movable plate, a sliding rail, a sliding block, a detection head, a third stepping motor, a driving disc and a poke rod; and the material collecting part comprises a plurality of mounting cavities, a plurality of movable shafts, a plurality of collecting boxes and a plurality of overturning motor