Silicon wafer clamping mechanism and wafer inserting machine system

The utility model discloses a silicon wafer clamping mechanism and a wafer inserting machine system, the silicon wafer clamping mechanism is used for the wafer inserting machine system, the silicon wafer clamping mechanism comprises a frame body, the frame body is provided with a containing groove,...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CAO YUEGANG, WU DI, ZHANG MENG, ZHAO BIN, YUE HEMING, CHEN GUOQING
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model discloses a silicon wafer clamping mechanism and a wafer inserting machine system, the silicon wafer clamping mechanism is used for the wafer inserting machine system, the silicon wafer clamping mechanism comprises a frame body, the frame body is provided with a containing groove, and a plurality of silicon wafers to be processed are suitable for being stacked in the containing groove along the length direction of the containing groove; the clamping assembly is arranged on the frame body, the clamping assembly comprises a plurality of clamping pieces which are arranged in the length direction of the containing groove, the clamping pieces are movably arranged on the frame body, and the clamping pieces are used for clamping a plurality of to-be-machined silicon wafers located in the containing groove. According to the silicon wafer clamping mechanism provided by the utility model, reliable fixation of the silicon wafers to be processed can be ensured, overall movement of the plurality of silic