Microbubble generating device and silicon wafer cleaning system

The utility model belongs to the technical field of microbubble generators, and particularly relates to a microbubble generating device and a silicon wafer cleaning system.The microbubble generating device comprises a liquid supply assembly, a gas supply assembly, a high-pressure dissolving tank and...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ZUO GUOJUN, SHEN BIN, CHENG XU, TAN LIWEN, JU LUPING
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CLEANING CLEANING IN GENERAL MIXING, e.g. DISSOLVING, EMULSIFYING, DISPERSING PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PREVENTION OF FOULING IN GENERAL TRANSPORTING
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