Microbubble generating device and silicon wafer cleaning system

The utility model belongs to the technical field of microbubble generators, and particularly relates to a microbubble generating device and a silicon wafer cleaning system.The microbubble generating device comprises a liquid supply assembly, a gas supply assembly, a high-pressure dissolving tank and...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZUO GUOJUN, SHEN BIN, CHENG XU, TAN LIWEN, JU LUPING
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:The utility model belongs to the technical field of microbubble generators, and particularly relates to a microbubble generating device and a silicon wafer cleaning system.The microbubble generating device comprises a liquid supply assembly, a gas supply assembly, a high-pressure dissolving tank and a spraying assembly; wherein the liquid supply assembly, the gas supply assembly, the high-pressure dissolving tank and the ejection assembly are connected in sequence; the liquid supply assembly is suitable for conveying liquid to the gas supply assembly, and the gas supply assembly mixes gas and the liquid and conveys the mixed gas and liquid to the high-pressure dissolving tank; the high-pressure dissolving tank is suitable for pressing gas into liquid through high pressure, so that the spraying assembly sprays out microbubble liquid; the liquid supply assembly is matched with the gas supply assembly, gas and liquid are mixed, the gas is pressed into the liquid in the high-pressure dissolving tank to be fully f