Positioning equipment for performance test of main reference surface of silicon carbide substrate

The utility model discloses positioning equipment for performance testing of a main reference surface of a silicon carbide substrate, and belongs to the technical field of semiconductor silicon carbide performance testing related equipment. The equipment comprises a base, the base is provided with a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LIU JIAPENG, SONG SHENG, WU DIANRUI, FU JIANXING, YANG FANGHUI, LEE SANG-HO, LIU XU, PENG HONGYU, LI BAOSHENG, LIANG QINGRUI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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