Positioning equipment for performance test of main reference surface of silicon carbide substrate

The utility model discloses positioning equipment for performance testing of a main reference surface of a silicon carbide substrate, and belongs to the technical field of semiconductor silicon carbide performance testing related equipment. The equipment comprises a base, the base is provided with a front positioning part, a left positioning part and a right positioning part, and a circle can be defined among the front positioning part, the left positioning part and the right positioning part, so that a silicon carbide substrate is limited among the front positioning part, the left positioning part and the right positioning part; a limiting piece for preventing the silicon carbide substrate from rotating is arranged between any two of the front positioning part, the left positioning part and the right positioning part, and the limiting piece can extend into a groove in the notch edge of the silicon carbide substrate, or the limiting piece can abut against the flat edge of the silicon carbide substrate. The po