Inspection device

The utility model provides an inspection device. An inspection apparatus according to an embodiment may include: a stage on which a substrate is placed; an image acquisition unit that captures an image of the substrate; a control unit that controls the operation of the image acquisition unit; and an image processing section that determines a defect by comparing image data acquired by the image acquired from the image acquisition section with reference image data, in which the image acquisition section may include: a camera that captures an image for the substrate; a filter unit that blocks light of a part of the wavelength band incident on the camera; a first light irradiation unit that irradiates the substrate with light of a visible light wavelength band; and a second light irradiation unit that irradiates the substrate with light of an ultraviolet wavelength band. 本实用新型提供一种检查装置。根据一实施例的检查装置可以包括：工作台，安置基板；图像获取部，拍摄所述基板的图像；控制部，控制所述图像获取部的操作；以及图像处理部，将通过从所述图像获取部获取的图像而获取的图像数据与基准图像数据进行比较来判断缺陷，其中，所述图像获取部可以包括：相机，拍摄针对所