MEMS flow sensor

The MEMS flow sensor comprises a substrate, a sensitive film, a medium temperature sensor, an upstream temperature sensor, a downstream temperature sensor, a micro heat source and a plurality of electrode PADs, the sensitive film is located on the substrate and provided with a plurality of hollowed-out parts penetrating up and down, the hollowed-out parts are evenly arranged, and the medium temperature sensor is located on the substrate. The plurality of hollows are vertical to the flowing direction of the fluid at the position of the sensitive film, the hollows are arranged by avoiding the medium temperature sensor, the upstream temperature sensor, the downstream temperature sensor, the micro heat source and the electric connecting wire area, and the upstream temperature sensor, the micro heat source and the downstream temperature sensor are uniformly arranged on the sensitive film in the middle area of the plurality of hollows; the micro heat source is located at the symmetric center of the upstream tempera