Reaction furnace and coating equipment with same

The utility model discloses a reaction furnace and coating equipment with the reaction furnace, the reaction furnace comprises: a furnace unit, which comprises a furnace body and an end cover arranged at the end part of the furnace body, and the end cover is provided with an assembly hole; the pipe...

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Hauptverfasser: WANG CHENYI, LIU BINGJI, LI XUEWEN, WANG KAI, ZHANG WEN
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Sprache:chi ; eng
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creator WANG CHENYI
LIU BINGJI
LI XUEWEN
WANG KAI
ZHANG WEN
description The utility model discloses a reaction furnace and coating equipment with the reaction furnace, the reaction furnace comprises: a furnace unit, which comprises a furnace body and an end cover arranged at the end part of the furnace body, and the end cover is provided with an assembly hole; the pipe unit comprises a pipe fitting, a SiC sheath and an insulation sealing assembly, the pipe fitting is arranged in the furnace body in a penetrating mode, arranged in the assembly hole in a penetrating mode and stretches out of the interior of the furnace body, the pipe fitting is sleeved with the SiC sheath, the SiC sheath is arranged in the furnace body in a penetrating mode, arranged in the assembly hole in a penetrating mode and stretches out of the interior of the furnace body, and the SiC sheath and the furnace unit are spaced; the insulation sealing assembly is connected outside the SiC sheath in a sleeving mode and located outside the furnace body, and the insulation sealing assembly is connected with the end
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language chi ; eng
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subjects CHEMICAL SURFACE TREATMENT
CHEMISTRY
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING MATERIAL WITH METALLIC MATERIAL
COATING METALLIC MATERIAL
DIFFUSION TREATMENT OF METALLIC MATERIAL
INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL
METALLURGY
SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
title Reaction furnace and coating equipment with same
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