Reaction furnace and coating equipment with same
The utility model discloses a reaction furnace and coating equipment with the reaction furnace, the reaction furnace comprises: a furnace unit, which comprises a furnace body and an end cover arranged at the end part of the furnace body, and the end cover is provided with an assembly hole; the pipe...
Gespeichert in:
Hauptverfasser: | , , , , |
---|---|
Format: | Patent |
Sprache: | chi ; eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | The utility model discloses a reaction furnace and coating equipment with the reaction furnace, the reaction furnace comprises: a furnace unit, which comprises a furnace body and an end cover arranged at the end part of the furnace body, and the end cover is provided with an assembly hole; the pipe unit comprises a pipe fitting, a SiC sheath and an insulation sealing assembly, the pipe fitting is arranged in the furnace body in a penetrating mode, arranged in the assembly hole in a penetrating mode and stretches out of the interior of the furnace body, the pipe fitting is sleeved with the SiC sheath, the SiC sheath is arranged in the furnace body in a penetrating mode, arranged in the assembly hole in a penetrating mode and stretches out of the interior of the furnace body, and the SiC sheath and the furnace unit are spaced; the insulation sealing assembly is connected outside the SiC sheath in a sleeving mode and located outside the furnace body, and the insulation sealing assembly is connected with the end |
---|