Semiconductor wafer photoresist removing equipment

The utility model discloses semiconductor wafer degumming equipment which comprises a degumming box, a lamp ring belt is fixedly installed in the degumming box, a control box is fixedly installed on one side of the degumming box, the inner side wall of the control box is fixedly connected with a fir...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	GENG LINRU, BAI YERU, LI NA, GAO XIANGZHI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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