Semiconductor wafer photoresist removing equipment

The utility model discloses semiconductor wafer degumming equipment which comprises a degumming box, a lamp ring belt is fixedly installed in the degumming box, a control box is fixedly installed on one side of the degumming box, the inner side wall of the control box is fixedly connected with a fir...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: GENG LINRU, BAI YERU, LI NA, GAO XIANGZHI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model discloses semiconductor wafer degumming equipment which comprises a degumming box, a lamp ring belt is fixedly installed in the degumming box, a control box is fixedly installed on one side of the degumming box, the inner side wall of the control box is fixedly connected with a first conductive block, and a second conductive block is arranged on one side of the first conductive block in an attached mode. And one side of the second conductive block is fixedly connected with an extrusion plate, the interior of the extrusion plate is movably connected with a limiting strip, and one side of the extrusion plate is fixedly provided with a spring. According to the semiconductor wafer degumming equipment, the corresponding connecting plates are rotated, so that the threaded columns extrude the extrusion plates, the second conductive blocks are attached to the first conductive blocks, the corresponding lamp ring belts are connected into a circuit, the use area of an irradiation lamp is conveniently c