Wafer cleaning device

The utility model discloses a wafer cleaning device. The wafer cleaning device comprises a wafer carrying table which comprises a wafer supporting piece and supports a wafer to be cleaned in a single-point mode so that the wafer to be cleaned can be fixed in a suspended mode; the cleaning arm compri...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	ZHOU XIANBING
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES TRANSPORTING
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