Chip feature detection equipment
The utility model relates to chip feature detection equipment. The chip feature detection equipment comprises a feeding mechanism, a detection mechanism and a detection mechanism, wherein the feeding mechanism is provided with a feeding position; the material shuttle module and the feeding mechanism...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model relates to chip feature detection equipment. The chip feature detection equipment comprises a feeding mechanism, a detection mechanism and a detection mechanism, wherein the feeding mechanism is provided with a feeding position; the material shuttle module and the feeding mechanism are arranged in the first direction, the material shuttle module is provided with a material placing position, a first detection position and a material taking position which are sequentially arranged in the second direction, and the second direction intersects with the first direction; the working stroke of the material taking manipulator module passes through the feeding position and the discharging position; the empty tray stacking module is located on one side of the feeding mechanism in the second direction and used for collecting empty trays from the feeding mechanism; the first positioning vision module is located in the working stroke of the material taking manipulator module; and the detection module is l |
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