Probe card floating ring assembly with diversion trench

The utility model discloses a probe card floating ring assembly with a diversion trench, which comprises a base and a floating ring, and the floating ring is arranged in the base and can move relative to the base. The bottom of the floating ring extends outwards to form a circle of annular face, and a plurality of flow guide grooves are formed in the annular face and evenly distributed in the outer circle of the annular face. According to the utility model, the movement of the floating ring is controlled by the change of air pressure, and the floating ring keeps a certain distance from the wafer all the time, thereby increasing the utilization rate of the probe; the flow guide grooves are uniformly distributed on the annular surface, so that the floating ring is stressed in a balanced manner, the problem of floating ring vibration caused by overlarge airflow is avoided, and the normal work of the probe card is ensured. 本实用新型公开了一种带导流槽的探针卡浮动环组件，包括底座和浮动环，浮动环置于底座内，可相对底座移动；所述浮动环底部向外延伸出一圈环形面，环形面上设有多个导流槽，导流槽均匀分布在环形面